THREE-DOF CMOS-MEMS PROBES WITH EMBEDDED PIEZORESISTIVE SENSORS

被引：0
|
作者：
Liu, J. [1 ]
Draghi, L. [1 ]
Bain, J. A. [1 ]
Schlesinger, T. E. [1 ]
Fedder, G. K. [1 ]
机构：
[1] Carnegie Mellon Univ, Pittsburgh, PA 15213 USA
来源：
MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2010年
关键词：
FORCE; MICROGRIPPER;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report on a new 3-DOF CMOS-MEMS electrothermal probe, featuring embedded piezoresistive sensors. These probes have the potential to be used independently for general 3-DOF nanoscale manipulation/manufacturing/scanning without external actuation and sensing. In this probe design, 3-DOF piezoresistive sensors are used to track probe actuation and applied force in all three directions, and thermal management such as dummy heater beams and metal-slotted thermal isolation structures are used to improve drive sensitivity.
引用
收藏
页码：284 / 287
页数：4
相关论文
共 50 条
  • [31] HIGH CURRENT LOW CONTACT RESISTANCE PLATINUM-COATED CMOS-MEMS PROBES
    Liu, J.
    Draghi, L.
    Noman, M.
    Bain, J. A.
    Schlesinger, T. E.
    Fedder, G. K.
    MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2010, : 1143 - 1146
  • [32] Design, Modeling and Simulation of CMOS-MEMS Piezoresistive Cantilever Based Carbon Dioxide Gas Sensor for Capnometry
    Mirza, Asif
    Hamid, Nor Hisham
    Khir, Mohd Hans Md
    Ashraf, Khalid
    Jan, M. T.
    Riaz, Kashif
    MEMS, NANO AND SMART SYSTEMS, PTS 1-6, 2012, 403-408 : 3769 - +
  • [33] A CMOS-MEMS THERMAL-PIEZORESISTIVE OSCILLATOR IMPLEMENTED FOR WIDE-RANGE PRESSURE SENSING APPLICATIONS
    Lin, Zhong-Wei
    Bhosale, Kalyani
    Li, Sheng-Shian
    2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2021, : 74 - 77
  • [34] Design and post-process of an integrated CMOS-MEMS IR emitter with an embedded detector
    Gamero, Vanessa J.
    Amorim, Pedro H. A.
    Sierra, Julian H.
    Rehder, Gustavo P.
    Alayo, Marco I.
    2018 SBFOTON INTERNATIONAL OPTICS AND PHOTONICS CONFERENCE (SBFOTON IOPC), 2018,
  • [35] VERTICAL INTEGRATION OF PRESSURE/HUMIDITY/TEMPERATURE SENSORS FOR CMOS-MEMS ENVIRONMENTAL SENSING HUB
    Lin, Yung-Chian
    Lee, Ya-Chu
    Yang, Chia-Hung
    Fang, Weileun
    2021 IEEE SENSORS, 2021,
  • [36] High-Sensitivity Magnetic Field Sensors Manufactured Utilizing CMOS-MEMS Technology
    Dai, Zhi-Xuan
    Tsai, Rong-Wei
    Shih, Qing-Hua
    IEEE SENSORS JOURNAL, 2025, 25 (06) : 9540 - 9549
  • [37] Low-Concentration Ammonia Gas Sensors Manufactured Using the CMOS-MEMS Technique
    Shen, Wei-Chun
    Shih, Po-Jen
    Tsai, Yao-Chuan
    Hsu, Cheng-Chih
    Dai, Ching-Liang
    MICROMACHINES, 2020, 11 (01)
  • [38] Thermoelectric Energy Micro Harvesters with Temperature Sensors Manufactured Utilizing the CMOS-MEMS Technique
    Shen, Yi-Xuan
    Tsai, Yao-Chuan
    Lee, Chi-Yuan
    Wu, Chyan-Chyi
    Dai, Ching-Liang
    MICROMACHINES, 2022, 13 (08)
  • [39] Process development for CMOS-MEMS sensors with robust electrically isolated bulk silicon microstructures
    Qu, Hongwei
    Xie, Huikai
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2007, 16 (05) : 1152 - 1161
  • [40] A NOVEL CMOS-MEMS TRI-AXIAL TACTILE FORCE SENSOR USING CAPACITIVE AND PIEZORESISTIVE SENSING MECHANISMS
    Chen, Yen-Lin
    Huang, Yu-Cheng
    Hsieh, Meng-Lin
    Yeh, Sheng-Kai
    Fang, Weileun
    2021 21ST INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2021, : 210 - 213
12345