THREE-DOF CMOS-MEMS PROBES WITH EMBEDDED PIEZORESISTIVE SENSORS

被引：0
|
作者：
Liu, J. [1 ]
Draghi, L. [1 ]
Bain, J. A. [1 ]
Schlesinger, T. E. [1 ]
Fedder, G. K. [1 ]
机构：
[1] Carnegie Mellon Univ, Pittsburgh, PA 15213 USA
来源：
MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2010年
关键词：
FORCE; MICROGRIPPER;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report on a new 3-DOF CMOS-MEMS electrothermal probe, featuring embedded piezoresistive sensors. These probes have the potential to be used independently for general 3-DOF nanoscale manipulation/manufacturing/scanning without external actuation and sensing. In this probe design, 3-DOF piezoresistive sensors are used to track probe actuation and applied force in all three directions, and thermal management such as dummy heater beams and metal-slotted thermal isolation structures are used to improve drive sensitivity.
引用
收藏
页码：284 / 287
页数：4
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