Thin-film NTC resistor based on SrNbxTi1-xO3

被引：0
|
作者：
Lai, PT [1 ]
Li, B [1 ]
Li, GQ [1 ]
机构：
[1] Univ Hong Kong, Dept Elect & Elect Engn, Hong Kong, Hong Kong, Peoples R China
来源：
1999 IEEE HONG KONG ELECTRON DEVICES MEETING, PROCEEDINGS | 1999年
关键词：
D O I：
10.1109/HKEDM.1999.836412
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A novel strontium titanate-niobate (SrNbxTi1-xO3) thin-film NTC (negative temperature coefficient) resistor is fabricated on a SiO2/Si substrate by rf sputtering technique. The resistance-temperature characteristics reveal that SrNbxTi1-xO3 thin-film resistor has a high sensitivity within. 30 degrees C similar to 400 degrees C. Specifically, there is a turning point at 320 degrees C, above which the resistance sharply decreases due to ionic conduction. The a.c characteristics are also investigated.
引用
收藏
页码：76 / 79
页数：4
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