THIN-FILM NICR RESISTOR

被引：14
|
作者：
BUCZEK, DM
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 02期
关键词：
D O I：
10.1116/1.569549
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：370 / 372
页数：3
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