Micromachined inertial sensors for vehicles

被引：0

作者：

Barbour, N ^{[1
]}

Brown, E ^{[1
]}

Connelly, J ^{[1
]}

Dowdle, J ^{[1
]}

Brand, G ^{[1
]}

Nelson, J ^{[1
]}

O'Bannon, J ^{[1
]}

机构：

[1] Charles Stark Draper Lab Inc, Cambridge, MA 02139 USA

来源：

IEEE CONFERENCE ON INTELLIGENT TRANSPORTATION SYSTEMS | 1997年

关键词：

micromechanical devices; inertial navigation; road vehicles; gyroscopes;

D O I：

暂无

中图分类号：

TN [电子技术、通信技术];

学科分类号：

0809 ;

摘要：

Micromachined silicon sensors offer tremendous cost, size, and reliability improvements for guidance, navigation, and control (GN&C). Currently the development of microelectromechanical systems (MEMS) inertial sensors is largely supported by DoD; however, it will ultimately be driven by high-volume commercial markets with target prices below $25 per instrument. This paper describes recent advances in micromechanical gyro and accelerometer design and packaging. Performance of a prototype automotive traction control module, in pilot production, and a planned automobile suspension control module are described. The concept of a 3-cubic-inch, multi-purpose MEMS inertial system, based on a three-gyro, three-accelerometer system under development for a guided artillery shell, is discussed for automotive applications. Plans for future cost and size reduction are presented.

引用

页码：1058 / 1063

页数：2

共 50 条

[1] Micromachined inertial sensors
Yazdi, N
Ayazi, F
Najafi, K
PROCEEDINGS OF THE IEEE, 1998, 86 (08) : 1640 - 1659
[2] Electronics for micromachined inertial sensors
Boser, BE
TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 1997, : 1169 - 1172
[3] Micromachined Fluid Inertial Sensors
Liu, Shiqiang
Zhu, Rong
SENSORS, 2017, 17 (02)
[4] Micromachined inertial sensors for monitoring alertness in aircrew
King, DO
Wright, N
Ward, MCL
EUROSENSORS XII, VOLS 1 AND 2, 1998, : 606 - 609
[5] A fourth-order ΣΔ interface for micromachined inertial sensors
Petkov, VP
Boser, BE
2004 IEEE INTERNATIONAL SOLID-STATE CIRCUITS CONFERENCE, DIGEST OF TECHNICAL PAPERS, 2004, 47 : 320 - 321
[6] A fourth-order ΣΔ interface for micromachined inertial sensors
Petkov, VP
Boser, BE
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 2005, 40 (08) : 1602 - 1609
[7] High-order electromechanical ΣΔ modulation in micromachined inertial sensors
Petkov, Vladimir P.
Boser, Bernhard E.
IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS I-REGULAR PAPERS, 2006, 53 (05) : 1016 - 1022
[8] Applications of inertial micromachined (MEMS) sensors for precision displacement measurement
Spiewak, SA
INTERNATIONAL JOURNAL OF MATERIALS & PRODUCT TECHNOLOGY, 2003, 18 (4-6): : 408 - 430
[9] Micromachined inertial sensors: the state-of-the-art and a look into the future.
Kraft, M
MEASUREMENT & CONTROL, 2000, 33 (06): : 164 - 168
[10] Tunneling-based micromachined inertial sensors for the advanced tactical IMU
Kubena, RL
Atkinson, GM
Robinson, WP
Stratton, FP
Joyce, RJ
Hardy, FW
PROCEEDINGS OF THE 52ND ANNUAL MEETING - THE INSTITUTE OF NAVIGATION: NAVIGATIONAL TECHNOLOGY FOR THE 3RD MILLENNIUM, 1996, : 595 - 599

← 1 2 3 4 5 →