共 50 条
- [11] Modeling and Experimental Study on Characterization of Micromachined Thermal Gas Inertial Sensors SENSORS, 2010, 10 (09): : 8304 - 8315
- [12] Micromachined inertial devices Yadian Yu Shengguang/Piezoelectrics and Acoustooptics, 1997, 19 (06): : 375 - 380
- [14] From single to multi-axial, decoupled mode micromachined inertial sensors with MDOS SENSORS AND MICROSYSTEMS, 2000, : 308 - 312
- [15] Novel dual-axisal soi micromachined inertial sensors with optical sensing: Design and fabrication 21ST IEEE CONVENTION OF THE ELECTRICAL AND ELECTRONIC ENGINEERS IN ISRAEL - IEEE PROCEEDINGS, 2000, : 65 - 68
- [19] Simulation of micromachined inertial sensors with higher-order single loop sigma-delta modulators NSTI NANOTECH 2004, VOL 1, TECHNICAL PROCEEDINGS, 2004, : 414 - 417