Electronics for micromachined inertial sensors

被引：0
|
作者：
Boser, BE
机构：
来源：
TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 1997年
关键词：
capacitive sensing; integrated sensors; noise;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Capacitive interface circuits for micromachined sensors are described. The focus is on the position sense electronics for accelerometers and gyroscopes. Special attention is given to the characteristics of the interface between the sensor and electronic circuits, and on practical and fundamental noise mechanisms that limit the achievable resolution.
引用
收藏
页码：1169 / 1172
页数：4
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