High Precision Motion Control of Piezo-Actuated Stages Using Discrete-Time Sliding Mode Control with Prescribed Performance Function

被引：0

作者：

Nguyen Manh Linh ^{[1
]}

Chen, Xinkai ^{[2
]}

机构：

[1] Shibaura Inst Technol, Grad Sch Engn & Sci, Saitama 3378570, Japan

[2] Shibaura Inst Technol, Dept Elect & Informat Syst, Saitama 3378570, Japan

来源：

2016 14TH INTERNATIONAL CONFERENCE ON CONTROL, AUTOMATION, ROBOTICS AND VISION (ICARCV) | 2016年

关键词：

Piezo-actuated stage; sliding mode control; disturbance observer; prescribed performance control;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

In this paper, high precision motion control of piezo-actuated stage is discussed. In order to cope with the nonlinear characteristic of the piezoelectric actuator (PEA) and get high tracking performance, this paper proposes a new approach to design the discrete time sliding mode control (DSMC) with an ability to maintain the tracking error in a known region described by a performance function. The effectiveness of the proposed method is verified by experiments. The results show that the system not only performs well with complicated desired trajectories but also robust against external disturbances.

引用

页数：6

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