Influence of loading QCMs with electrochemically-deposited ZnO on their NO2-sensing properties

被引:3
|
作者
Georgieva, B. [1 ]
Nichev, H. [2 ]
Petrov, M. [2 ]
Koutzarova, T. [1 ]
Georgieva, V. [3 ]
Dimova-Malinovska, D. [2 ]
机构
[1] Bulgarian Acad Sci, E Djakov Inst Elect, 72 Tzarigradsko Chaussee, Sofia 1784, Bulgaria
[2] Bulgarian Acad Sci, Cent Lab Solar Energy & New Energy Sources, 72 Tzarigradsko Chaussee, Sofia 1784, Bulgaria
[3] Bulgarian Acad Sci, G Nadjakov Inst Solid State Phys, 72 Tzarigradsko Chaussee, Sofia 1784, Bulgaria
关键词
GAS SENSOR; FILMS;
D O I
10.1088/1742-6596/992/1/012026
中图分类号
O59 [应用物理学];
学科分类号
摘要
This paper reports on ZnO layers' sensitivity to NO2 exposure. ZnO layers were grown by electrochemical deposition on the surface of quartz crystal microbalances (QCMs) with Au electrodes; the sensitivity was estimated by the frequency-time characteristics (FTCs) of the QCM, namely, its resonance-frequency-shift response. The sorption process was investigated in NO2 test gas. The behavior was studied of three different sensors with ZnO layers deposited for different times -30, 35 and 60 min. The change in the frequency, Delta F, of the QCM as a function of the loaded mass of NO2 was detected in different NO2 concentrations in the range of 250 - 5000 ppm and the value of the sorbed mass was calculated, together with the rate of the NO2 sorption and desorption. As the time of ZnO layers deposition was increased, the sorbed NO2 mass increased for all concentrations used in the experiment. This can be explained by changes in the ZnO layers' structure with the time of deposition.
引用
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页数:5
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