The measurement of supersmooth surface roughness with angstrom dimension

被引：0
|
作者：
Gao, CF [1 ]
Liu, XY [1 ]
Wang, LJ [1 ]
Liu, WN [1 ]
机构：
[1] Jilin Univ, Dept Mech Sci & Engn, Changchun 130025, Peoples R China
来源：
PROGRESS OF MACHINING TECHNOLOGY: WITH SOME TOPICS IN ADVANCED MANUFACTURING TECHNOLOGY | 2002年
关键词：
supersmooth; roughness; measurement;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This paper compared the most popular supersmooth roughness measurement instruments -Atom Force Microscope and Interferometric profiler. It was suggested that there was obviously different roughness magnitude when the same machined surface is measured though both have high longitudinal resolution. Interferometric profiler is preferred for measuring surface roughness while AFM is suitable for probing into more micro scale problems.
引用
收藏
页码：628 / 631
页数：4
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