The measurement of supersmooth surface roughness with angstrom dimension

被引：0

作者：

Gao, CF ^{[1
]}

Liu, XY ^{[1
]}

Wang, LJ ^{[1
]}

Liu, WN ^{[1
]}

机构：

[1] Jilin Univ, Dept Mech Sci & Engn, Changchun 130025, Peoples R China

来源：

PROGRESS OF MACHINING TECHNOLOGY: WITH SOME TOPICS IN ADVANCED MANUFACTURING TECHNOLOGY | 2002年

关键词：

supersmooth; roughness; measurement;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper compared the most popular supersmooth roughness measurement instruments -Atom Force Microscope and Interferometric profiler. It was suggested that there was obviously different roughness magnitude when the same machined surface is measured though both have high longitudinal resolution. Interferometric profiler is preferred for measuring surface roughness while AFM is suitable for probing into more micro scale problems.

引用

页码：628 / 631

页数：4

共 50 条

[31] INTERFEROMETRIC SURFACE ROUGHNESS MEASUREMENT
RIBBENS, WB
APPLIED OPTICS, 1969, 8 (11): : 2173 - &
[32] Measurement of surface roughness and topography
Brem, TB
1996 PLASTIC LAMINATES SYMPOSIUM, 1996, : 73 - 75
[33] Algebraic methods to study the dimension of supersmooth spline spaces
Toshniwal, Deepesh
Villamizar, Nelly
ADVANCES IN APPLIED MATHEMATICS, 2023, 142
[34] Fractal Dimension Analysis of Surface Roughness for Paper and Paperboard
Lee Y.J.
Kang N.Y.
Cha J.E.
Lee J.M.
Lee D.Y.
Kim H.J.
Palpu Chongi Gisul/Journal of Korea Technical Association of the Pulp and Paper Industry, 2023, 55 (04): : 3 - 11
[35] Analysing roughness of surface through fractal dimension: A review
Nayak, Soumya Ranjan
Mishra, Jibitesh
Palai, Gopinath
IMAGE AND VISION COMPUTING, 2019, 89 : 21 - 34
[36] Fractal dimension analysis of surface roughness of coated paper
Oh Y.-T.
Kim H.-W.
Kim H.-J.
Ko Y.-C.
Park J.-M.
Palpu Chongi Gisul/Journal of Korea Technical Association of the Pulp and Paper Industry, 2019, 51 (01): : 46 - 53
[37] Correlation dimension as a measure of surface roughness of protein molecules
Choi, JH
Kim, H
Lee, S
JOURNAL OF CHEMICAL PHYSICS, 1998, 109 (16): : 7001 - 7004
[38] Roughness and fractal dimension of polished granite surface and their relationship
Key Lab. of Stone Machining, Huaqiao University, Quanzhou 362021, China
Jiliang Xuebao, 2007, 2 (124-128):
[39] The evolution of roughness of supersmooth surfaces by ion-beam etching
M. M. Barysheva
Yu. A. Vainer
B. A. Gribkov
M. V. Zorina
A. E. Pestov
N. N. Salashchenko
R. A. Khramkov
N. I. Chkhalo
Bulletin of the Russian Academy of Sciences: Physics, 2012, 76 (2) : 163 - 167
[40] SURFACE ROUGHNESS MEASUREMENT BY FOCUSING METHOD
KAGAMI, J
HATAZAWA, T
KOIKE, K
YAMADA, K
JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS, 1989, 34 (04) : 291 - 297

← 1 2 3 4 5 →