Two Dimensional Photonic Crystal Waveguide Based Micro-Pressure Sensor

被引：0
|
作者：
Bakhtazad, Aref [1 ]
Sabarinathan, Jayshri [1 ]
Hutter, Jeff
机构：
[1] Univ Western Ontario, Dept Elect & Comp Engn, London, ON N6A 5B9, Canada
来源：
2009 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1AND 2 | 2009年
关键词：
D O I：
10.1109/LEOS.2009.5343347
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A photonic crystal waveguide based micro-pressure sensor has been designed, fabricated and tested. Atomic force microscopy was used to evaluate the mechanical response of the device and correlated to the optical output of the sensor.
引用
收藏
页码：763 / 764
页数：2
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