Two Dimensional Photonic Crystal Waveguide Based Micro-Pressure Sensor

被引：0
|
作者：
Bakhtazad, Aref [1 ]
Sabarinathan, Jayshri [1 ]
Hutter, Jeff
机构：
[1] Univ Western Ontario, Dept Elect & Comp Engn, London, ON N6A 5B9, Canada
来源：
2009 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1AND 2 | 2009年
关键词：
D O I：
10.1109/LEOS.2009.5343347
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A photonic crystal waveguide based micro-pressure sensor has been designed, fabricated and tested. Atomic force microscopy was used to evaluate the mechanical response of the device and correlated to the optical output of the sensor.
引用
收藏
页码：763 / 764
页数：2
相关论文
共 50 条
  • [31] Realization of pressure sensor based on a GaAs-based two dimensional photonic crystal slab on SiO2 substrate
    Norouzi, Saeide
    Fasihi, Kiazand
    JOURNAL OF COMPUTATIONAL ELECTRONICS, 2022, 21 (02) : 513 - 521
  • [32] Towards a Highly Sensitive Pressure Sensor Using an Infrared (IR) Laser and a Two-dimensional (2-D) Photonic Crystal Waveguide
    Mishra, C. S.
    Das, S.
    Nayak, M. R.
    Pukhrambam, P. D.
    Panda, A.
    Palai, G.
    LASERS IN ENGINEERING, 2022, 53 (1-2) : 105 - 119
  • [33] Geometry optimization for micro-pressure sensor considering dynamic interference
    Yu, Zhongliang
    Zhao, Yulong
    Li, Lili
    Tian, Bian
    Li, Cun
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2014, 85 (09):
  • [34] Guided modes in a two-dimensional metallic photonic crystal waveguide
    Qiu, M
    He, SL
    PHYSICS LETTERS A, 2000, 266 (4-6) : 425 - 429
  • [35] Waveguides and waveguide bends in two-dimensional photonic crystal slabs
    Chutinan, A
    Noda, S
    PHYSICAL REVIEW B, 2000, 62 (07): : 4488 - 4492
  • [36] A micro-pressure sensor-based analytic platform and its application in thrombin quantification
    Yang, Weiqiang
    Li, Rongjie
    Wang, Qingping
    Wei, Qiaohua
    Fu, Caili
    Li, Zhenyu
    Chen, Guonan
    ANALYTICAL METHODS, 2015, 7 (19) : 7985 - 7988
  • [37] The micro-cavity of the two dimensional plasmonic photonic crystal
    Tong, Kai
    Zhang, Zhenguo
    Yang, Qing
    EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2015, 69 (02):
  • [38] Photon Hall effect in two-dimensional photonic crystal waveguide
    Zhao, Li-Ming
    Zhou, Yun-Song
    Wei, Gong-Min
    EPL, 2021, 135 (06)
  • [39] A bridged waveguide intersection in two-dimensional photonic crystal structures
    Khanmirzaei, Ali H.
    Abrishamian, M. S.
    OPTIK, 2012, 123 (07): : 653 - 656
  • [40] Two-dimensional photonic crystal hexagonal waveguide ring laser
    Kim, SH
    Ryu, HY
    Park, HG
    Kim, GH
    Choi, YS
    Lee, YH
    Kim, JS
    APPLIED PHYSICS LETTERS, 2002, 81 (14) : 2499 - 2501
12345