MEMS ion source for mass spectrometer integrated on a chip

被引：5
|
作者：
Szyszka, P. [1 ]
Grzebyk, T. [1 ]
Gorecka-Drzazga, A. [1 ]
Dziuban, J. A. [1 ]
机构：
[1] Wroclaw Univ Sci & Technol, Fac Microsyst Elect & Photon, 11-17 Janiszewskiego Str, PL-50372 Wroclaw, Poland
来源：
16TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2016) | 2016年 / 773卷
关键词：
D O I：
10.1088/1742-6596/773/1/012099
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
The paper describes silicon-glass MEMS electron impact ion source developed for miniature mass spectrometer (MS) integrated on a chip. The device consists of the field emission electron source with an electrophoretically deposited carbon nanotube cathode and ion beam formation electrodes. Ion source structure has been fabricated using MEMS technology. A complete manufacturing process of the test structures has been successfully elaborated and implemented.
引用
收藏
页数：4
相关论文
共 50 条
  • [41] MEMS quadrupole mass spectrometer
    Szyszka, Piotr
    Jendryka, Jakub
    Sobkow, Jan
    Zychla, Michal
    Bialas, Marcin
    Knapkiewicz, Pawel
    Dziuban, Jan
    Grzebyk, Tomasz
    SENSORS AND ACTUATORS B-CHEMICAL, 2024, 411
  • [42] A concept of MEMS mass spectrometer
    Szyszka, Piotr
    Grzebyk, Tomasz
    Gorecka-Drzazga, Anna
    Dziuban, Jan A.
    2018 XV INTERNATIONAL SCIENTIFIC CONFERENCE ON OPTOELECTRONIC AND ELECTRONIC SENSORS (COE), 2018,
  • [43] An integrated MEMS hematology chip
    Seimitsu Kogaku Kaishi, 2008, 7 (746-751):
  • [44] ROCKET BORNE MASS SPECTROMETER WITH HELIUM COOLED ION SOURCE
    OFFERMANN, D
    TRINKS, H
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1971, 42 (12): : 1836 - +
  • [45] SMALL ION SOURCE FOR MSKH-3A MASS SPECTROMETER
    KAPRALOV, BG
    KOTLOV, VI
    BARANOV, SV
    KOTELNIK.YN
    INDUSTRIAL LABORATORY, 1970, 36 (05): : 786 - &
  • [46] SYSTEM FOR VAPORIZING SAMPLES DIRECTLY IN ION SOURCE OF MASS SPECTROMETER
    KEARNS, GL
    ANALYTICAL CHEMISTRY, 1964, 36 (07) : 1402 - &
  • [47] Surface Phenomena in the Ionization Chamber of the Mass Spectrometer Ion Source
    V. G. Lukin
    O. G. Khvostenko
    G. M. Tuimedov
    High Energy Chemistry, 2022, 56 : 114 - 121
  • [48] NEUTRALIZATION OF FRINGING MAGNETIC FIELDS IN ION SOURCE OF A MASS SPECTROMETER
    MARMET, P
    MORRISON, JD
    SWINGLER, DL
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1962, 33 (02): : 239 - &
  • [49] Pulsed Field Ion Source Combined With Mass Spectrometer.
    Roellgen, F.W.
    Beckey, H.D.
    Messtechnik, 1972, 80 (05): : 115 - 118
  • [50] Surface Phenomena in the Ionization Chamber of the Mass Spectrometer Ion Source
    Lukin, V. G.
    Khvostenko, O. G.
    Tuimedov, G. M.
    HIGH ENERGY CHEMISTRY, 2022, 56 (02) : 114 - 121
12345