MEMS ion source for mass spectrometer integrated on a chip

被引：5

作者：

Szyszka, P. ^{[1
]}

Grzebyk, T. ^{[1
]}

Gorecka-Drzazga, A. ^{[1
]}

Dziuban, J. A. ^{[1
]}

机构：

[1] Wroclaw Univ Sci & Technol, Fac Microsyst Elect & Photon, 11-17 Janiszewskiego Str, PL-50372 Wroclaw, Poland

来源：

16TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2016) | 2016年 / 773卷

关键词：

D O I：

10.1088/1742-6596/773/1/012099

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

The paper describes silicon-glass MEMS electron impact ion source developed for miniature mass spectrometer (MS) integrated on a chip. The device consists of the field emission electron source with an electrophoretically deposited carbon nanotube cathode and ion beam formation electrodes. Ion source structure has been fabricated using MEMS technology. A complete manufacturing process of the test structures has been successfully elaborated and implemented.

引用

页数：4

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