MEMS ion source for mass spectrometer integrated on a chip

被引：5
|
作者：
Szyszka, P. [1 ]
Grzebyk, T. [1 ]
Gorecka-Drzazga, A. [1 ]
Dziuban, J. A. [1 ]
机构：
[1] Wroclaw Univ Sci & Technol, Fac Microsyst Elect & Photon, 11-17 Janiszewskiego Str, PL-50372 Wroclaw, Poland
来源：
16TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2016) | 2016年 / 773卷
关键词：
D O I：
10.1088/1742-6596/773/1/012099
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
The paper describes silicon-glass MEMS electron impact ion source developed for miniature mass spectrometer (MS) integrated on a chip. The device consists of the field emission electron source with an electrophoretically deposited carbon nanotube cathode and ion beam formation electrodes. Ion source structure has been fabricated using MEMS technology. A complete manufacturing process of the test structures has been successfully elaborated and implemented.
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页数：4
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