On-chip integrated inductors with Ni-Zn-Cu-Fe and Y-bi-Fe ferrite thin-films for RF IC

被引：0

作者：

Yang, Chen ^{[1
]}

Liu, Feng ^{[1
]}

Ren, Tianling ^{[1
]}

Liu, Litian ^{[1
]}

Wang, Albert Z. ^{[2
]}

机构：

[1] Tsinghua Univ, Inst Microelect, Beijing 100084, Peoples R China

[2] IIT, Dept Elect & Comp Engn, Chicago, IL 60616 USA

来源：

ESSDERC 2006: PROCEEDINGS OF THE 36TH EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE | 2006年

基金：

美国国家科学基金会;

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

On-chip RF integrated inductors with Ni0.4Zn0.4Cu0.2Fe2O4 and Y2.8Bi0.2Fe5O12 ferrite thin-films have been fabricated using IC compatible processes. The ferrite thin-films prepared by spin-coated method show good magnetic performance for RF inductor applications. The high-frequency characteristics of inductor samples are tested, compared and analyzed using the equivalent circuit, with the data of Co7ZrO9 ferrite inductor in prior work. The experiments demonstrate that, ferrite thin-film integration improves the inductor performance significantly, which is a promising way to achieve super compact high-performance on-chip inductors for RF IC.

引用

页码：194 / +

页数：2