On-chip integrated inductors with Ni-Zn-Cu-Fe and Y-bi-Fe ferrite thin-films for RF IC

被引：0
|
作者：
Yang, Chen [1 ]
Liu, Feng [1 ]
Ren, Tianling [1 ]
Liu, Litian [1 ]
Wang, Albert Z. [2 ]
机构：
[1] Tsinghua Univ, Inst Microelect, Beijing 100084, Peoples R China
[2] IIT, Dept Elect & Comp Engn, Chicago, IL 60616 USA
来源：
ESSDERC 2006: PROCEEDINGS OF THE 36TH EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE | 2006年
基金：
美国国家科学基金会;
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
On-chip RF integrated inductors with Ni0.4Zn0.4Cu0.2Fe2O4 and Y2.8Bi0.2Fe5O12 ferrite thin-films have been fabricated using IC compatible processes. The ferrite thin-films prepared by spin-coated method show good magnetic performance for RF inductor applications. The high-frequency characteristics of inductor samples are tested, compared and analyzed using the equivalent circuit, with the data of Co7ZrO9 ferrite inductor in prior work. The experiments demonstrate that, ferrite thin-film integration improves the inductor performance significantly, which is a promising way to achieve super compact high-performance on-chip inductors for RF IC.
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页码：194 / +
页数：2
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