共 50 条
- [22] Monte Carlo simulation and experiments of electron beam direct writing on curved Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2022, 30 (18): : 2232 - 2240
- [23] Monte Carlo simulation of Gauss-distribution beam spot in electron beam lithography Weixi Jiagong Jishu/Microfabrication Technology, 2001, (03):
- [24] Monte Carlo simulation of electron swarm parameters in O2 EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2007, 37 (03): : 335 - 341
- [30] Monte Carlo simulation of high-energy electron beam lithography process 2013 13TH IEEE CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO), 2013, : 622 - 626