共 50 条
- [6] Monte Carlo simulation of process parameters in electron beam lithography for thick resist patterning [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2006, 24 (03): : 1202 - 1209
- [7] Monte Carlo simulation of projection electron beam lithography [J]. NANOSCIENCE AND TECHNOLOGY, PTS 1 AND 2, 2007, 121-123 : 1097 - 1101
- [8] Initial beam energy determination for Monte Carlo simulation [J]. MEDICAL PHYSICS, 2004, 31 (06) : 1731 - 1732
- [10] Automatic Determination of Stepsize Parameters in Monte Carlo Simulation Tested on a Bromodomain-Binding Octapeptide [J]. ALGORITHMS, 2009, 2 (01): : 215 - 226