GaAs arrays for X-ray spectroscopy

被引:5
|
作者
Owens, A [1 ]
Andersson, H [1 ]
Campbell, M [1 ]
Lumb, D [1 ]
Nenonen, S [1 ]
Tlustos, L [1 ]
机构
[1] ESA, Estec, SCIAT, Sci Payload & Adv Concepts Off, NL-2200 AG Noordwijk, Netherlands
来源
关键词
compound semiconductors; GaAs; X-ray arrays;
D O I
10.1117/12.552930
中图分类号
V [航空、航天];
学科分类号
08 ; 0825 ;
摘要
We present results from our compound semiconductor laboratory program and describe the development of a large area GaAs imaging array for planetary remote sensing applications. The device is fabricated from similar to150 micron thick epitaxial material, patterned into a 64 x 64 pixel array, back-thinned and contacted. It will be flip-chip bump bonded onto a custom designed, fully spectroscopic, low noise (< 20 e- rms) active pixel sensor ASIC. At present, the ASIC is still under development and so in order to validate and qualify the various technological steps, we have produced a GaAs imager based on the MEDIPIX-1 format using a MEDIPIX-1 readout chip. In X-ray tests, the device was found to work well with a bump yield of 99.9%. After flat field corrections, the spatial uniformity of the array was commensurate with Poisson noise.
引用
收藏
页码:241 / 248
页数:8
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