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- [45] Synthesis and Characterization of Self-Assembled, High Aspect Ratio nm-Scale Columnar Silicon Structures 2013 IEEE 39TH PHOTOVOLTAIC SPECIALISTS CONFERENCE (PVSC), 2013, : 530 - 534
- [48] Sub nm-Scale Precision Stage using Nonresonant-Ultrasonic Motor for Making of Nano Devices SMART NANO-MICRO MATERIALS AND DEVICES, 2011, 8204
- [49] Sub-10 nm-scale capacitors and tunnel junctions measurements by SMM coupled to RF interferometry 2015 45TH EUROPEAN MICROWAVE CONFERENCE (EUMC), 2015, : 658 - 661
- [50] Comparison of at-wavelength inspection, printability, and simulation of nm-scale substrate defects in extreme ultraviolet lithography (EUVL). 19TH ANNUAL SYMPOSIUM ON PHOTOMASK TECHNOLOGY, PTS 1 AND 2, 1999, 3873 : 429 - 439