Characterization of Integrated Inductors on Flexible Substrate for Heterogeneous Integration

被引：1
|
作者：
Freitas, Wilson [1 ]
Carvalho, Nailson [2 ]
Souza, Rodrigo [2 ]
Manera, Leandro [1 ]
机构：
[1] Univ Estadual Campinas, FEEC, DSIF, Campinas, Brazil
[2] CTI Renato Archer, NAPE, Campinas, Brazil
来源：
2020 IEEE 8TH ELECTRONICS SYSTEM-INTEGRATION TECHNOLOGY CONFERENCE (ESTC) | 2020年
关键词：
integrated inductor; Kapton flexible substrate; heterogeneous integration;
D O I：
10.1109/estc48849.2020.9229878
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
This work presents the characterization of integrated inductors on a flexible substrate, fabricated through simple and original technology. Kapton was used as the flexible substrate with gold metallization and silicon dioxide as the dielectric. Several inductors were fabricated with a different number of turns, line widths, line spacing, internal diameters, and geometries to verify the influence of such different configurations on the inductor ' s performance. It was possible to obtain inductors compatible with voltage-controlled oscillators design and other radio frequency and microwave circuits, enabling the advancement of heterogeneous integration.
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页数：5
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