Characterization of Integrated Inductors on Flexible Substrate for Heterogeneous Integration

被引：1

作者：

Freitas, Wilson ^{[1
]}

Carvalho, Nailson ^{[2
]}

Souza, Rodrigo ^{[2
]}

Manera, Leandro ^{[1
]}

机构：

[1] Univ Estadual Campinas, FEEC, DSIF, Campinas, Brazil

[2] CTI Renato Archer, NAPE, Campinas, Brazil

来源：

2020 IEEE 8TH ELECTRONICS SYSTEM-INTEGRATION TECHNOLOGY CONFERENCE (ESTC) | 2020年

关键词：

integrated inductor; Kapton flexible substrate; heterogeneous integration;

D O I：

10.1109/estc48849.2020.9229878

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This work presents the characterization of integrated inductors on a flexible substrate, fabricated through simple and original technology. Kapton was used as the flexible substrate with gold metallization and silicon dioxide as the dielectric. Several inductors were fabricated with a different number of turns, line widths, line spacing, internal diameters, and geometries to verify the influence of such different configurations on the inductor ' s performance. It was possible to obtain inductors compatible with voltage-controlled oscillators design and other radio frequency and microwave circuits, enabling the advancement of heterogeneous integration.

引用

页数：5

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