Characterization of Integrated Inductors on Flexible Substrate for Heterogeneous Integration

This work presents the characterization of integrated inductors on a flexible substrate, fabricated through simple and original technology. Kapton was used as the flexible substrate with gold metallization and silicon dioxide as the dielectric. Several inductors were fabricated with a different number of turns, line widths, line spacing, internal diameters, and geometries to verify the influence of such different configurations on the inductor ' s performance. It was possible to obtain inductors compatible with voltage-controlled oscillators design and other radio frequency and microwave circuits, enabling the advancement of heterogeneous integration.