A Low Voltage Thermo-Electrostatic Actuated MEMS-Based Switch

Requirement of voltage up-converters due to high pull-in voltage is one of the main problems by merely electrostatic actuated MEMS-based switches. Thermally actuated switches are another alternatives but with very high power dissipation. In this paper a low voltage switch is demonstrated, which uses a combined thermoelectrostatic actuator. The switch can be integrated with standard CMOS circuits without any up-converters. Thermally power dissipation for the switch is lower than just thermal actuators. The switching time is about 70 mu s and the maximal temperature of thermal actuator is lower than 150 degrees C which cannot cause any longtime damage.