A Low Voltage Thermo-Electrostatic Actuated MEMS-Based Switch

被引：0
|
作者：
Mahmoudi, P. [1 ]
Ghavifekr, H. Badri [1 ]
机构：
[1] Sahand Univ Technol, Dept Elect Engn, Tabriz, Iran
来源：
ACTUATOR 10, CONFERENCE PROCEEDINGS | 2010年
关键词：
RF-MEMS; Microswitch; Thermo-electrostatic actuation; Voltage up-converter; Pull-in voltage;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Requirement of voltage up-converters due to high pull-in voltage is one of the main problems by merely electrostatic actuated MEMS-based switches. Thermally actuated switches are another alternatives but with very high power dissipation. In this paper a low voltage switch is demonstrated, which uses a combined thermoelectrostatic actuator. The switch can be integrated with standard CMOS circuits without any up-converters. Thermally power dissipation for the switch is lower than just thermal actuators. The switching time is about 70 mu s and the maximal temperature of thermal actuator is lower than 150 degrees C which cannot cause any longtime damage.
引用
收藏
页码：352 / 355
页数：4
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