Determination of Mg concentration and distribution in MgxZn1-xO films for photonic devices application

Among the transparent conductor, one of the most interesting is the Al doped MgxZn1-xO films for their electrical properties that make it very attracting for solar cell application. In this work, the Mg distribution in Al doped Mg(x)Zn(1-)xO films was investigated in order to find a reliable methods to determine Mg distribution. In particular, X-ray diffraction, Auger electron spectroscopy and time of flight secondary ion mass spectrometry were used to characterize the film. Time of flight secondary ion mass spectrometry MCs+ results appear to be the most promising analytical technique. Copyright (C) 2014 John Wiley & Sons, Ltd.