Nanoindentation of silicon nitride: A multimillion-atom molecular dynamics study

被引：60
|
作者：
Walsh, P [1 ]
Omeltchenko, A
Kalia, RK
Nakano, A
Vashishta, P
Saini, S
机构：
[1] Univ So Calif, Dept Mat Sci & Engn, Collab Adv Comp & Simulat, Los Angeles, CA 90089 USA
[2] Univ So Calif, Dept Phys & Astron, Los Angeles, CA 90089 USA
[3] Univ So Calif, Dept Comp Sci, Los Angeles, CA 90089 USA
[4] NASA, Numer Aerosp Simulat Facil, Ames Res Ctr, Moffett Field, CA 94035 USA
来源：
APPLIED PHYSICS LETTERS | 2003年 / 82卷 / 01期
关键词：
D O I：
10.1063/1.1535263
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Nanoindentation of crystalline and amorphous silicon nitride films is studied using 10-million-atom molecular dynamics simulations. A rigid pyramid-shaped indenter tip is used. Load-displacement curves are computed and are used to derive hardness and elastic moduli of the simulated crystalline and amorphous films. Computer images of local pressure distributions and configuration snapshots show that plastic deformation in the film extends to regions far from the actual indent. (C) 2003 American Institute of Physics.
引用
收藏
页码：118 / 120
页数：3
相关论文
共 50 条
  • [1] Amorphization and anisotropic fracture dynamics during nanoindentation of silicon nitride: A multimillion atom molecular dynamics study
    Walsh, P
    Kalia, RK
    Nakano, A
    Vashishta, P
    Saini, S
    APPLIED PHYSICS LETTERS, 2000, 77 (26) : 4332 - 4334
  • [2] Multimillion-atom nanoindentation simulation of crystalline silicon carbide: Orientation dependence and anisotropic pileup
    Chen, Hsiu-Pin
    Kalia, Rajiv K.
    Nakano, Aiichiro
    Vashishta, Priya
    Szlufarska, Izabela
    Journal of Applied Physics, 2007, 102 (06):
  • [3] Structural transformation, amorphization, and fracture in nanowires: A multimillion-atom molecular dynamics study
    Walsh, P
    Li, W
    Kalia, RK
    Nakano, A
    Vashishta, P
    Saini, S
    APPLIED PHYSICS LETTERS, 2001, 78 (21) : 3328 - 3330
  • [4] Multimillion-atom nanoindentation simulation of crystalline silicon carbide: Orientation dependence and anisotropic pileup
    Chen, Hsiu-Pin
    Kalia, Rajiv K.
    Nakano, Aiichiro
    Vashishta, Priya
    Szlufarska, Izabela
    JOURNAL OF APPLIED PHYSICS, 2007, 102 (06)
  • [5] Scaling of Multimillion-Atom Biological Molecular Dynamics Simulation on a Petascale Supercomputer
    Schulz, Roland
    Lindner, Benjamin
    Petridis, Loukas
    Smith, Jeremy C.
    JOURNAL OF CHEMICAL THEORY AND COMPUTATION, 2009, 5 (10) : 2798 - 2808
  • [6] InAs/GaAs square nanomesas: Multimillion-atom molecular dynamics simulations on parallel computers
    Su, XT
    Kalia, RK
    Nakano, A
    Vashishta, P
    Madhukar, A
    JOURNAL OF APPLIED PHYSICS, 2003, 94 (10) : 6762 - 6773
  • [7] Size effect on the oxidation of aluminum nanoparticle: Multimillion-atom reactive molecular dynamics simulations
    Li, Ying
    Kalia, Rajiv K.
    Nakano, Aiichiro
    Vashishta, Priya
    JOURNAL OF APPLIED PHYSICS, 2013, 114 (13)
  • [8] InAs/GaAs square nanomesas: Multimillion-atom molecular dynamics simulations on parallel computers
    Su, X., 1600, American Institute of Physics Inc. (94):
  • [9] Size effect on the oxidation of aluminum nanoparticle: Multimillion-atom reactive molecular dynamics simulations
    1600, American Institute of Physics Inc. (114):
  • [10] Crack Initiation, Kinking and Nanoscale Damage in Silica Glass: Multimillion-Atom Molecular Dynamics Simulations
    Chen, Y. C.
    Nomura, K.
    Lu, Z.
    Kalia, R.
    Nakano, A.
    Vashishta, P.
    IUTAM SYMPOSIUM ON MODELLING NANOMATERIALS AND NANOSYSTEMS, 2009, 13 : 13 - 17
12345