Temperature dependence of capacitance/current-voltage characteristics of highly (0001)-oriented YMnO3 thin films on Si

被引:48
|
作者
Yi, WC [1 ]
Seo, CS
Kwun, SI
Yoon, JG
机构
[1] Seoul Natl Univ, Dept Phys, Seoul 151742, South Korea
[2] Univ Suwon, Dept Phys, Kyung Gi Do 445743, South Korea
关键词
D O I
10.1063/1.1289067
中图分类号
O59 [应用物理学];
学科分类号
摘要
Highly (0001)-oriented YMnO3 thin films on Si(100) substrates were obtained by using a stable precursor solution and rapid thermal annealing at a low temperature of 650 degrees C in a chemical solution deposition process. Temperature-dependent capacitance-voltage (C-V) and current-voltage (I-V) characteristics were discussed in a metal-ferroelectric-semiconductor structure. At 300 K, the voltage-dependent increase of the memory window (Delta V) in the C-V curve and the asymmetric I-V curve were attributed to the formation of positive interfacial charges by field- and thermal-excited electron transport. On the other hand, at 220 K, the voltage-independent Delta V was attributed to ferroelectric polarization switching. (C) 2000 American Institute of Physics. [S0003-6951(00)04633-7].
引用
收藏
页码:1044 / 1046
页数:3
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