Post titanium silicide processing

被引：0
|
作者：
Grynkewich, G [1 ]
Ilderem, V [1 ]
Miller, M [1 ]
Ramaswami, S [1 ]
机构：
[1] MOTOROLA INC,ADV CUSTOM TECHNOL,MESA,AZ 85202
来源：
SILICIDE THIN FILMS - FABRICATION, PROPERTIES, AND APPLICATIONS | 1996年 / 402卷
关键词：
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：71 / 81
页数：11
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