PREPARATION AND CHARACTERIZATION OF MULTILAYER METALLIZATION STRUCTURES WITH TITANIUM NITRIDE AND TITANIUM SILICIDE

被引：7
|
作者：
PANJAN, P
NAVINSEK, B
ZABKAR, A
MANDRINO, D
GODEC, M
KOZELJ, M
KRIVOKAPIC, Z
ZALAR, A
机构：
[1] ISKRA MICROELECTR,YU-61000 LJUBLJANA,YUGOSLAVIA
[2] INST ELECTR & VACUUM TECH,YU-61000 LJUBLJANA,YUGOSLAVIA
来源：
THIN SOLID FILMS | 1989年 / 181卷
关键词：
D O I：
10.1016/0040-6090(89)90470-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：35 / 41
页数：7
相关论文
共 50 条
  • [1] CHARACTERIZATION OF MULTILAYER STRUCTURES WITH TITANIUM NITRIDE AND TITANIUM SILICIDE
    PANJAN, P
    ZABKAR, A
    NAVINSEK, B
    KRASEVEC, V
    MARINKOVIC, V
    MANDRINO, D
    GODEC, M
    MACEK, M
    ZALAR, A
    VACUUM, 1990, 41 (4-6) : 1272 - 1274
  • [2] MULTILAYER METALLIZATION STRUCTURES WITH TITANIUM NITRIDE AND TITANIUM SILICIDE PREPARED BY MULTIPULSE LASER IRRADIATION
    CRACIUN, V
    MIHAILESCU, IN
    URSU, I
    CRACIUNOIU, F
    CORICI, A
    LEGGIERI, G
    LUCHES, A
    NASSISI, V
    MARTINO, M
    APPLIED PHYSICS LETTERS, 1988, 52 (15) : 1225 - 1227
  • [3] MULTILAYER TITANIUM NITRIDE AND SILICIDE STRUCTURES SYNTHESIZED BY MULTIPULSE EXCIMER LASER IRRADIATION
    DANNA, E
    LEGGIERI, G
    LUCHES, A
    MARTINO, M
    PERRONE, A
    MENGUCCI, P
    MIHAILESCU, IN
    APPLIED SURFACE SCIENCE, 1992, 54 : 353 - 357
  • [4] Characterization of the low temperature behavior of thin Titanium/Titanium Nitride multilayer films
    Faverzani, M.
    Ferri, E.
    Giachero, A.
    Giordano, C.
    Margesin, B.
    Mezzena, R.
    Nucciotti, A.
    Puiu, A.
    SUPERCONDUCTOR SCIENCE & TECHNOLOGY, 2020, 33 (04):
  • [5] Formation of titanium nitride/titanium silicide by high pressure nitridation in titanium/silicon
    Chen, Shih-Chang, 1600, (30):
  • [6] ELECTROLESS COPPER METALLIZATION OF TITANIUM NITRIDE
    PATTERSON, JC
    NIDHEASUNA, C
    BARRETT, J
    SPALDING, TR
    OREILLY, M
    JIANG, X
    CREAN, GM
    APPLIED SURFACE SCIENCE, 1995, 91 (1-4) : 124 - 128
  • [7] Preparation of titanium silicide powders from titanium chips
    Levinskii, YV
    Petrov, AP
    Zolotova, OS
    INORGANIC MATERIALS, 1998, 34 (05) : 452 - 455
  • [8] FORMATION OF TITANIUM NITRIDE TITANIUM SILICIDE BY HIGH-PRESSURE NITRIDATION IN TITANIUM SILICON
    CHEN, SC
    TAMURA, H
    HARA, T
    INOUE, K
    ENDO, N
    KINOSHITA, K
    NAKAMURA, S
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (11A): : 2673 - 2678
  • [9] TITANIUM NITRIDE AS A DIFFUSION BARRIER IN METALLIZATION SCHEMES
    CHEUNG, N
    VONSEEFELD, H
    NICOLET, MA
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (08) : C346 - C346
  • [10] TITANIUM SILICIDE AND TITANIUM NITRIDE FORMATION BY TITANIUM-ION IMPLANTATION FOR MOS LSI APPLICATIONS
    OMURA, Y
    INOKAWA, H
    IZUMI, K
    JOURNAL OF MATERIALS RESEARCH, 1991, 6 (06) : 1238 - 1247
12345