Energy filtering and coaxial detection of the backscattered electrons in scanning electron microscope

被引：0
|
作者：
Jiang, CZ [1 ]
Morin, P
Rosenberg, N
机构：
[1] Wuhan Univ, Dept Phys, Wuhan 430072, Peoples R China
[2] Univ Lyon 1, Dept Phys Mat, F-69622 Villeurbanne, France
来源：
CHINESE PHYSICS LETTERS | 2000年 / 17卷 / 09期
关键词：
D O I：
10.1088/0256-307X/17/9/005
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
A new detection system in scanning electron microscope, which filters in energy and detects the backscattered electrons close to the microscope axis, is described. This technique ameliorates the dependence of the backscattering coefficient on atomic number, and suppresses effectively the relief contrast at the same time. Therefore this new method is very suitable to the composition analysis.
引用
收藏
页码：637 / 639
页数：3
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