Energy filtering and coaxial detection of the backscattered electrons in scanning electron microscope

被引：0

作者：

Jiang, CZ ^{[1
]}

Morin, P

Rosenberg, N

机构：

[1] Wuhan Univ, Dept Phys, Wuhan 430072, Peoples R China

[2] Univ Lyon 1, Dept Phys Mat, F-69622 Villeurbanne, France

来源：

CHINESE PHYSICS LETTERS | 2000年 / 17卷 / 09期

关键词：

D O I：

10.1088/0256-307X/17/9/005

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

A new detection system in scanning electron microscope, which filters in energy and detects the backscattered electrons close to the microscope axis, is described. This technique ameliorates the dependence of the backscattering coefficient on atomic number, and suppresses effectively the relief contrast at the same time. Therefore this new method is very suitable to the composition analysis.

引用

页码：637 / 639

页数：3

共 50 条

[21] Spatial resolution and energy filtering of backscattered electron images in scanning electron microscopy
Merli, PG
Migliori, A
Morandi, V
Rosa, R
ULTRAMICROSCOPY, 2001, 88 (02) : 139 - 150
[22] Imaging and analysis of subsurface Cu interconnects by detecting backscattered electrons in the scanning electron microscope
Gignac, LM
Kawasaki, M
Boettcher, SH
Wells, OC
JOURNAL OF APPLIED PHYSICS, 2005, 97 (11)
[23] VARIABLE MULTIPLE DETECTOR SYSTEM FOR SECONDARY AND BACKSCATTERED ELECTRONS IN A SCANNING ELECTRON-MICROSCOPE
BONGELER, R
REIMER, L
SENKEL, R
EUREM 88, VOLS 1-3: TUTORIALS, INSTRUMENTATION AND TECHNIQUES / PHYSICS AND MATERIALS / BIOLOGY, 1988, 93 : 239 - 240
[24] VARIABLE MULTIPLE DETECTOR SYSTEM FOR SECONDARY AND BACKSCATTERED ELECTRONS IN A SCANNING ELECTRON-MICROSCOPE
BONGELER, R
REIMER, L
SENKEL, R
INSTITUTE OF PHYSICS CONFERENCE SERIES, 1988, (93): : 239 - 240
[25] Expanding the Analytical Capabilities of Scanning Electron Microscopy in the Detection of Backscattered Electrons
S. V. Zaitsev
E. Yu. Zykova
E. I. Rau
A. A. Tatarintsev
V. A. Kiselevskii
Instruments and Experimental Techniques, 2023, 66 : 1058 - 1065
[26] Expanding the Analytical Capabilities of Scanning Electron Microscopy in the Detection of Backscattered Electrons
Zaitsev, S. V.
Zykova, E. Yu.
Rau, E. I.
Tatarintsev, A. A.
Kiselevskii, V. A.
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 2023, 66 (06) : 1058 - 1065
[27] Detection and application of the backscattered electrons with low loss energy and close to the microscope axis
Jiang, Changzhong
Peng, Yougui
Zhang, Wencui
Weixi Jiagong Jishu/Microfabrication Technology, 2000, (03): : 18 - 22
[28] Estimation of the oxidation state of uranium in microparticles by using scanning electron microscope in the backscattered electrons mode
Dyukov V.G.
Stebelkov V.A.
Khoroshilov V.V.
Dyukov, V.G., 1600, Allerton Press Incorporation (78): : 846 - 850
[29] Use of backscattered electron detector arrays for forming backscattered electron images in the scanning electron microscope
Wells, OC
Gignac, LM
Murray, CE
Frye, A
Bruley, J
SCANNING, 2006, 28 (01) : 27 - 31
[30] Quantitative Dopant Profiling by Energy Filtering in the Scanning Electron Microscope
Chee, Augustus K. W.
IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, 2016, 16 (02) : 138 - 148

← 1 2 3 4 5 →