Negative power absorption in inductively coupled plasma

被引：99

作者：

Godyak, VA ^{[1
]}

Kolobov, VI ^{[1
]}

机构：

[1] UNIV HOUSTON,DEPT CHEM ENGN,HOUSTON,TX 77204

来源：

PHYSICAL REVIEW LETTERS | 1997年 / 79卷 / 23期

关键词：

D O I：

10.1103/PhysRevLett.79.4589

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

We report an observation of negative power absorption of electromagnetic field in a low-pressure cylindrical inductive discharge. The spatial distribution of the absorbed power is found experimentally from measurement of the azimuthal rf electric field and current, and theoretically by solving the Maxwell-Boltzmann equations by Fourier method. It appears that plasma electrons electromagnetic energy in the skin layer, can apparently return a part of their energy to the rf field deeper into the plasma.

引用

页码：4589 / 4592

页数：4

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