Negative power absorption in inductively coupled plasma

被引：99
|
作者：
Godyak, VA [1 ]
Kolobov, VI [1 ]
机构：
[1] UNIV HOUSTON,DEPT CHEM ENGN,HOUSTON,TX 77204
来源：
PHYSICAL REVIEW LETTERS | 1997年 / 79卷 / 23期
关键词：
D O I：
10.1103/PhysRevLett.79.4589
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
We report an observation of negative power absorption of electromagnetic field in a low-pressure cylindrical inductive discharge. The spatial distribution of the absorbed power is found experimentally from measurement of the azimuthal rf electric field and current, and theoretically by solving the Maxwell-Boltzmann equations by Fourier method. It appears that plasma electrons electromagnetic energy in the skin layer, can apparently return a part of their energy to the rf field deeper into the plasma.
引用
收藏
页码：4589 / 4592
页数：4
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