Mass Sensor Based on Thin Film Bulk Acoustic Resonator

被引：0
|
作者：
Wu, Biyan [1 ]
机构：
[1] Zhejiang Gongshang Univ, Comp & Informat Engn Coll, Hangzhou 310015, Zhejiang, Peoples R China
来源：
PROCEEDINGS OF THE 2009 2ND INTERNATIONAL CONFERENCE ON BIOMEDICAL ENGINEERING AND INFORMATICS, VOLS 1-4 | 2009年
关键词：
FBAR; mass Sensor;
D O I：
暂无
中图分类号：
TP18 [人工智能理论];
学科分类号：
081104 ; 0812 ; 0835 ; 1405 ;
摘要：
A mass sensor based on thin film bulk acoustic resonator (FBAR) is submitted in this paper. This sensor is fabricated by standard MEMS process as back-etch structure and its resonator curve is measured by Agilent Vector network analyer. The results show that this sensor's Q factor is above 610 and resonance frequency is about 1608MHz. This FEAR sensor is applied as humidity sensor. The reproducibility of this sensor' SII and Q factor are evaluated.
引用
收藏
页码：1018 / 1021
页数：4
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