Thin film bulk acoustic resonator (FBAR) technology and its applications

被引：0
|
作者：
He, Jie [1 ]
Liu, Rong-Gui [1 ]
Ma, Jin-Yi [1 ]
机构：
[1] Sichuan Institute of Piezoelectric and Acousto-optic Technology, Chongqing 400060, China
来源：
Yadian Yu Shengguang/Piezoelectrics and Acoustooptics | 2007年 / 29卷 / 04期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The thin film bulk acoustic wave devices have the features of small size, low cost, high Q-value, high power handling capability and application of high frequencies and compatibility with IC-technology. They can be used advantageously in RF system operating between land 10 GHz. They are expected to replace traditional SAW devices and microwave ceramic devices in the future wireless communication system. This paper presents an overview of the principle of FBAR technology and its new development and applications. Three device structures and their fabrications were analyzed. A brief discussion of the future trends and challenges of FBAR technology is also described.
引用
收藏
页码：379 / 382
相关论文
共 50 条
  • [1] Elastic Effects of Electrode on Thin Film Bulk Acoustic Resonator (FBAR)
    Zhang, Tao
    Ma, Hongwei
    Li, Man
    Xie, You
    Liu, Ting
    2012 WORLD AUTOMATION CONGRESS (WAC), 2012,
  • [2] A film bulk acoustic resonator (FBAR) duplexer for USPCS handset applications
    Bradley, P
    Ruby, F
    Larson, JD
    Oshmyansky, Y
    Figueredo, D
    2001 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3, 2001, : 367 - 370
  • [3] Finite element modelling of a thin-film bulk acoustic resonator (FBAR)
    Buccella, Concettina
    De Santis, Valerio
    Feliziani, Mauro
    Tognolatti, Piero
    COMPEL-THE INTERNATIONAL JOURNAL FOR COMPUTATION AND MATHEMATICS IN ELECTRICAL AND ELECTRONIC ENGINEERING, 2008, 27 (06) : 1296 - 1306
  • [4] Optimization on Thin Film Bulk Acoustic Resonator(FBAR) by Transmitting Line Method
    Zhang, Tao
    Li, Min
    Liu, Ping
    Sun, Bin
    Zhou, Shengnan
    ADVANCED MATERIALS DESIGN AND MECHANICS, 2012, 569 : 149 - 152
  • [5] Design and Analysis of Film Bulk Acoustic Resonator (FBAR) Filter for RF Applications
    Reddy, P. Ramakoti
    Mohan, B. Chandra
    INTERNATIONAL JOURNAL OF ENGINEERING BUSINESS MANAGEMENT, 2012, 4
  • [6] Optimization of film bulk acoustic wave resonator (FBAR) for RF filter applications
    Yim, M
    Kim, DH
    Chai, DK
    Jung, JP
    Park, J
    Yoon, G
    BOSTON 2003 RADIO & WIRELESS RAWCON CONFERENCE, PROCEEDINGS, 2003, : 389 - 392
  • [7] Thin film bulk wave acoustic resonators (FBAR) for wireless applications
    Ruby, RC
    Bradley, P
    Oshmyansky, Y
    Chien, A
    Larson, JD
    2001 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 2001, : 813 - 821
  • [8] Thin film bulk acoustic wave resonator and filter technology
    Lakin, KM
    McCarron, KT
    Belsick, J
    McDonald, JF
    RAWCON 2001: IEEE RADIO AND WIRELESS CONFERENCE, PROCEEDINGS, 2001, : 89 - 92
  • [9] Design and simulation of Film Bulk Acoustic Wave Resonator (FBAR) Gas Sensor Based on ZnO Thin Film
    Sabani, Zarifsofia
    Ralib, Aliza Aini Md
    Karim, Jamilah
    Saidin, Norazlina Bt
    Razali, Nur Fatin Binti Mohamad
    PROCEEDINGS OF THE 2019 IEEE REGIONAL SYMPOSIUM ON MICRO AND NANOELECTRONICS (RSM), 2019, : 34 - 37
  • [10] STUDY OF STRUCTURAL FABRICATION PROCESS OF FILM BULK ACOUSTIC RESONATOR (FBAR)
    Huang, Guang-jun
    Shi, Yu
    Yang, Jie
    Zhao, Bao-lin
    Zhong, Hui
    PROCEEDINGS OF THE 2008 SYMPOSIUM ON PIEZOELECTRICITY, ACOUSTIC WAVES AND DEVICE APPLICATIONS, 2008, : 304 - 308
12345