Determining thin film density by energy-dispersive x-ray reflectivity: Application to a spin-on-glass dielectric

被引：0

作者：

Wallace, WE ^{[1
]}

Wu, WL ^{[1
]}

机构：

[1] NIST,GAITHERSBURG,MD 20899

来源：

SURFACE/INTERFACE AND STRESS EFFECTS IN ELECTRONIC MATERIALS NANOSTRUCTURES | 1996年 / 405卷

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：393 / 398

页数：6

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