Particle and heat transport in a low-frequency inductively coupled plasma

The radial profiles of induced radio frequency magnetic fields, of plasma density, and of electron temperatures are measured in low-frequency inductively coupled plasmas. Oxygen and argon data are compared to one-dimensional fluid calculations that Include time-averaged induced magnetic fields. These comparisons suggest that the induced magnetic fields broaden the profiles of input radio frequency power, somewhat flatten the density profiles, and produce an electron temperature increase in the edge region of oxygen discharges. (C) 1998 American Institute of Physics.