In situ catalyzation of carbon nanostructures growth in low-frequency inductively coupled plasmas

被引:17
|
作者
Long, JD [1 ]
Xu, S [1 ]
Huang, SY [1 ]
Rutkevych, PP [1 ]
Xu, M [1 ]
Diong, CH [1 ]
机构
[1] Nanyang Technol Univ, Sch Math & Phys Sci, NIE, Plasma Sources & Applicat Ctr, Singapore 637616, Singapore
关键词
carbon nanostructure; inductively coupled plasma; in situ catalyzation;
D O I
10.1109/TPS.2005.845340
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
A low-frequency inductively coupled plasma source has been employed for in situ catalyzed growth of carbon nano-structures. The catalyzing process depends strongly on the plasma parameters and controls the shape and alignment of nanostructures.
引用
收藏
页码:240 / 241
页数:2
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