Power transfer and mode transitions in low-frequency inductively coupled plasmas

被引：99
|
作者：
Ostrikov, KN
Xu, S
Yu, MY
机构：
[1] Nanyang Technol Univ, NIE, Plasma Proc Lab, Singapore 259756, Singapore
[2] Flinders Univ S Australia, Dept Phys, Adelaide, SA 5001, Australia
[3] Ruhr Univ Bochum, Inst Theoret Phys 1, D-44780 Bochum, Germany
[4] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore
来源：
JOURNAL OF APPLIED PHYSICS | 2000年 / 88卷 / 05期
关键词：
D O I：
10.1063/1.1289055
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Operation and mode jumps in low-frequency (500 kHz) radio-frequency inductively coupled plasmas are investigated. The discharge is driven by a flat inductive coil which can excite the electrostatic (E) and electromagnetic (H) discharge modes. The power transfer efficiency and mode transition behavior are studied. It is found that the power reflection coefficient as a function of the input power is minimal in the vicinity of the mode transitions and exhibits hysteresis, which is also observed when the operating gas pressure is varied. (C) 2000 American Institute of Physics. [S0021-8979(00)01419-5].
引用
收藏
页码：2268 / 2271
页数：4
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