Preparation of self-organized porous tungsten oxide using HFCVD technique

被引:9
|
作者
Chavez, Fernando [2 ]
Felipe, Carlos [1 ,2 ]
Lima, Enrique [3 ]
Lara, Victor [4 ]
Angeles-Chavez, Carlos [5 ]
Hernandez, Miguel A. [6 ]
机构
[1] Inst Politecn Nacl, CIIEMAD, Dept Biociencias & Ingn, Mexico City 07340, DF, Mexico
[2] Benemerita Univ Autonoma Puebla, ICUAP, Dept Fis Quim Mat, Puebla 72000, Mexico
[3] Univ Nacl Autonoma Mexico, Inst Invest Mat, Mexico City 04510, DF, Mexico
[4] Univ Autonoma Metropolitana Iztapalapa, Dept Quim, Mexico City 09340, DF, Mexico
[5] Inst Mexicano Petr, Programa Ingn Mol, Mexico City 07730, DF, Mexico
[6] Benemerita Univ Autonoma Puebla, ICUAP, Dept Invest Zeolitas, Puebla 72000, Mexico
关键词
Tungsten oxide; Chemical vapour deposition; Porous media; Fractal dimension; ANGLE SCATTERING DATA; THIN-FILMS; NANOWIRES; DEPOSITION; CATALYSTS; SYSTEMS; GROWTH; WO3; HYDRODESULFURIZATION; ADSORPTION;
D O I
10.1016/j.matchemphys.2009.10.017
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Hot filament chemical vapour deposition (HFCVD) technique was applied to deposit a porous tungsten oxide film on glass wafers. The tungsten filament was used as a source in a vacuum atmosphere. The porous film was characterized by scanning electron microscopy, energy-dispersive X-ray spectroscopy, X-ray thermodiffraction, nitrogen sorption and small-angle X-ray scattering. From these characterization techniques it was found that porous film presents a clusters-like morphology of WO3-x particles. The particles are arranged on substrate in a way that free spaces are originated, as a 3D network of pores. By increasing temperature, the BET specific surface area of the porous film changes from 38.67 to 34.5 m(2) g(-1) most likely due to the particles have a tendency to stick together to form aggregates, particularly at high temperature. A fractal geometry approach permits to elucidate the interconnection between the particles and a simple model of the porous structure is proposed. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:36 / 41
页数:6
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