Thermal flow sensors for harsh environment applications

We report on a development of thermal flow sensors which are especially elaborated for applications in harsh environments. The sensor is performed using SOI technology and presents a high robustness to pressure or stress. He is adapted for the measure of high flow rates up to 500 l/h in Water or air velocity up to 100 m/s. Until now such measurement ranges could be attained using bypass solutions for micro-mechanical sensor. The novel sensor is directly implemented in the fluid channel wall using a specific encapsulation like packaging. This technology is developed to respond to the new special requirements.