Thermal flow sensors for harsh environment applications

被引：3

作者：

Billat, S. ^{[1
]}

Storz, M. ^{[1
]}

Ashauer, H. ^{[1
]}

Hedrich, F. ^{[1
]}

Kattinger, G. ^{[1
]}

Lust, L. ^{[2
]}

Ashauer, M. ^{[1
]}

Zengerle, R. ^{[1
]}

机构：

[1] HSG IMIT, Microfluid, D-78052 Villingen Schwenningen, Germany

[2] Elbau Elekt GmbH, D-13088 Berlin, Germany

来源：

PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE | 2009年 / 1卷 / 01期

关键词：

Flow sensor; high flow rates; harsh environments; packaging;

D O I：

10.1016/j.proche.2009.07.364

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We report on a development of thermal flow sensors which are especially elaborated for applications in harsh environments. The sensor is performed using SOI technology and presents a high robustness to pressure or stress. He is adapted for the measure of high flow rates up to 500 l/h in Water or air velocity up to 100 m/s. Until now such measurement ranges could be attained using bypass solutions for micro-mechanical sensor. The novel sensor is directly implemented in the fluid channel wall using a specific encapsulation like packaging. This technology is developed to respond to the new special requirements.

引用

页码：1459 / +

页数：2

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