Compact amorphous-silicon visible-light monitor integrated in silicon nitride waveguides

被引：0

作者：

De Vita, Christian ^{[1
]}

Klitis, Charalambos ^{[2
]}

Codreanu, Nina ^{[1
,3
,4
]}

Ferrari, Giorgio ^{[1
]}

Sorel, Marc ^{[2
]}

Melloni, Andrea ^{[1
]}

Morichetti, Francesco ^{[1
]}

机构：

[1] Politecn Milan, Dept Elect, Informat & Bioengn DEIB, I-20133 Milan, Italy

[2] Univ Glasgow, Rankine Bldg,Oakfield Ave, Glasgow G12 8LT, Scotland

[3] Delft Univ Technol, Dept Quantum Nanosci, QuTech, Delft, Netherlands

[4] Delft Univ Technol, Kavli Inst Nanosci, Delft, Netherlands

来源：

2021 IEEE 17TH INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS (GFP 2021) | 2021年

关键词：

optical waveguides; amorphous silicon; integrated detectors; visible light; photonic integrated circuits;

D O I：

10.1109/GFP51802.2021.9673949

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This work reports on the realization of an amorphous silicon visible-light detector integrated in Si3N4 waveguides. The device is very compact (< 40 mu m), has a responsivity of about 10 mA/W and a sensitivity of -40 dBm.

引用

页数：2

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