SILICON-NITRIDE AMORPHOUS-SILICON INTERFACES IN AN MIS JUNCTION

被引：2

|

作者：

HATANAKA, Y

KAWAI, S

SUZUKI, Y

ASAI, Y

SHIMAOKA, G

机构：

来源：

APPLIED SURFACE SCIENCE | 1988年 / 33-4卷

关键词：

D O I：

10.1016/0169-4332(88)90382-0

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：792 / 796

页数：5

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