In-situ surface analyses of Si(111) electrodes in fluoride containing solutions during current oscillations

被引：0
|
作者：
Rauscher, S [1 ]
Nast, O [1 ]
Jungblut, H [1 ]
Lewerenz, HJ [1 ]
机构：
[1] Hahn Meitner Inst Kernforsch Berlin GmbH, Abt CG, D-14109 Berlin, Germany
来源：
CLEANING TECHNOLOGY IN SEMICONDUCTOR DEVICE MANUFACTURING V | 1998年 / 35卷
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
Electrochemically induced current oscillations of n- and p-type Si(111) in fluoride containing solutions and the corresponding chemical, electronical and morphological variations are investigated by different in-situ techniques: fast Fourier transform infrared spectroscopy, microwave reflectivity and atomic force microscopy. An oscillating behavior exhibiting the same frequency as the current is observed for the absorption due to Si-O bindings, the reflected microwave signal and the surface roughness. The results are discussed in terms of a competition between oxidation of silicon and oxide etching.
引用
收藏
页码：439 / 446
页数：8
相关论文
共 50 条
  • [41] CURRENT OSCILLATIONS DURING ANODIC-DISSOLUTION OF P-SI IN AMMONIUM FLUORIDE - AN INVESTIGATION USING RING DISK VOLTAMMETRY AND ELLIPSOMETRY
    STUMPER, J
    GREEF, R
    PETER, LM
    JOURNAL OF ELECTROANALYTICAL CHEMISTRY, 1991, 310 (1-2): : 445 - 452
  • [42] IN-SITU SURFACE TECHNIQUE ANALYSES AND EX-SITU CHARACTERIZATION OF SI1-XGEX EPILAYERS GROWN ON SI(001)-2X1 BY MOLECULAR-BEAM EPITAXY
    AUBEL, D
    DIANI, M
    STOEHR, M
    BISCHOFF, JL
    KUBLER, L
    BOLMONT, D
    FRAISSE, B
    FOURCADE, R
    MULLER, D
    JOURNAL DE PHYSIQUE III, 1994, 4 (04): : 733 - 740
  • [43] Current oscillations observed during codeposition of copper and tin from sulfate solutions containing Laprol 2402C
    Survila, A
    Mockus, Z
    Juskenas, R
    ELECTROCHIMICA ACTA, 1998, 43 (08) : 909 - 917
  • [44] Benzene intermediates and mechanisms during catalytic oxidation on the Pt(111) surface using in-situ soft X-ray methods
    Marsh, AL
    Burnett, DJ
    Fischer, DA
    Gland, JL
    JOURNAL OF PHYSICAL CHEMISTRY B, 2003, 107 (45): : 12472 - 12479
  • [45] IN-SITU HIGH-TEMPERATURE STM STUDY OF THE RESTRUCTURING PROCESS ON THE SI(111)7X7 SURFACE UPON AG DEPOSITION
    SHIBATA, A
    KIMURA, Y
    TAKAYANAGI, K
    SURFACE SCIENCE, 1994, 303 (1-2) : 161 - 170
  • [46] ATOMIC-SCALE ETCHING PROCESSES OF N-SI(111) IN NH4F SOLUTIONS - IN-SITU SCANNING-TUNNELING-MICROSCOPY
    KAJI, K
    YAU, SL
    ITAYA, K
    JOURNAL OF APPLIED PHYSICS, 1995, 78 (09) : 5727 - 5733
  • [47] In situ scanning tunneling microscopy imaging of well-defined Rh(111) electrodes in KNO2-containing 0.5 m hydrofluoric acid solutions
    Zang, ZH
    Wu, ZL
    Yau, SL
    LANGMUIR, 1999, 15 (25) : 8750 - 8756
  • [48] Si film electrodes containing surface-modified Cu current collectors prepared by a low temperature oxidation-reduction process
    Cho, Gyu-Bong
    Jeong, Jae-Seung
    Im, Yeon-Min
    Choi, Hyon-Kwang
    Noh, Jung-Pil
    Kim, Jae-Kwang
    Ahn, Hyo-Jun
    Nam, Tae-Hyun
    Kim, Ki-Won
    VACUUM, 2016, 132 : 130 - 137
  • [49] In-situ passivation combined with GaN buffer optimization for extremely low current dispersion and low gate leakage in Si3N4/AlGaN/GaN HEMT devices on Si (111)
    Germain, M.
    Cheng, K.
    Derluyn, J.
    Degroote, S.
    Das, J.
    Lorenz, A.
    Marcon, D.
    Van Hove, M.
    Leys, M.
    Borghs, G.
    PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 5, NO 6, 2008, 5 (06): : 2010 - 2012
  • [50] High-surface area carbon nanofiber supercapacitor electrodes derived from an in-situ porogen-containing terpolymer: P(AN-VIM-IA)
    Ferraris, John
    Abeykoon, Nimali
    Mahmood, Samsuddin
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2016, 251
12345