MEMS Stage Integrated with Microlens Arrays for High-Resolution Beam Steering

被引：1

作者：

Gokce, Sertan Kutal ^{[1
]}

Holmstrom, Sven ^{[1
]}

Hibert, Cyrille ^{[2
]}

Ataman, Caglar ^{[3
]}

Arslan, Aslihan ^{[1
]}

Seren, Huseyin R. ^{[1
]}

Urey, Hakan ^{[1
]}

机构：

[1] KOC Univ, Dept Elect Engn, TR-34450 Istanbul, Turkey

[2] Ecole Polytech Fed Lausanne, Ctr Microfabricat, CH-1015 Lausanne, Switzerland

[3] Ecole Polytech Fed Lausanne, SAMLAB, Neuchatel, Switzerland

来源：

PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE | 2009年 / 1卷 / 01期

关键词：

Hybrid integration; Comb drive; Beam steering; SCANNER;

D O I：

10.1016/j.proche.2009.07.329

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A novel micromechanical stage with a uniaxial set of combfingers capable of 2D actuation is designed and developed. Driven at resonance the stage deflects up to 108 mu m out-of-plane and 102 mu m in-plane, with 140V and 94V peak-to-peak actuation voltage, respectively.

引用

页码：1319 / +

页数：2

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