Optical beam steering using MEMS-controllable microlens array

被引：90

作者：

Tuantranont, A ^{[1
]}

Bright, VM ^{[1
]}

Zhang, J ^{[1
]}

Zhang, W ^{[1
]}

Neff, JA ^{[1
]}

Lee, YC ^{[1
]}

机构：

[1] Univ Colorado, Dept Mech Engn, NSF Ctr Adv Mfg & Packaging Microwave Opt & Digit, Boulder, CO 80309 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2001年 / 91卷 / 03期

关键词：

microlens; beam steering; flip-chip; optical interconnects; MEMS;

D O I：

10.1016/S0924-4247(01)00609-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Novel, two-dimensional MEMS-controllable microlens array has been integrated with a vertical cavity surface emitting laser (VCSEL) array using flip-chip assembly. The MEMS/VCSEL hybrid system is built as an efficient and reliable smart pixel array for board-to-board or chip-to-chip optical interconnects in digital systems. Theory including geometrical and Fourier transform analysis and beam steering experimental results are presented. By translating polymer microlens, fabricated on a MEMS X-Y movable plate, using electro-thermal actuators, a beam steering angle of 70 mrad is achieved. VCSEL beam steering was successfully demonstrated in our MEMS/VCSEL hybrid system to collimate and steer laser beam for a precision alignment in a two-dimensional free-space optical interconnect. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：363 / 372

页数：10

共 50 条

[1] Optical beam steering using MEMS-controllable microlens array
Tuantranont, A.
Bright, V.M.
Zhang, J.
Zhang, W.
Neff, J.A.
Lee, Y.C.
[J]. Sensors and Actuators, A: Physical, 2001, 90 (03) : 363 - 372
[2] Quasi-optical beam steering using a MEMS reflector array
Srigengan, V
Mitchell, SJN
Fusco, VF
Campbell, DH
Linton, D
Gamble, HS
[J]. Opto-Ireland 2005: Optoelectronics, Photonic Devices, and Optical Networks, 2005, 5825 : 585 - 592
[3] Implementing optical phased array beam steering with cascaded microlens arrays
Watson, EA
Whitaker, WE
Brewer, CD
Harris, SR
[J]. 2002 IEEE AEROSPACE CONFERENCE PROCEEDINGS, VOLS 1-7, 2002, : 1429 - 1436
[4] Actively Controllable Beam Steering Optical Wireless Communication (OWC) Using Integrated Optical Phased Array (OPA)
Chow, Chi-Wai
Chang, You-Chia
Kuo, Sheng-, I
Kuo, Pin-Cheng
Wang, Ju-Wei
Jian, Yin-He
Ahmad, Zohauddin
Fu, Po-Han
Shi, Jin-Wei
Huang, Ding-Wei
Hung, Tun-Yao
Lin, Yuan-Zeng
Yeh, Chien-Hung
Liu, Yang
[J]. JOURNAL OF LIGHTWAVE TECHNOLOGY, 2023, 41 (04) : 1122 - 1128
[5] Optical beam steering using phased array technology
McManamon, PF
Watson, EA
[J]. OPTICAL SCANNING SYSTEMS: DESIGN AND APPLICATIONS, 1997, 3131 : 90 - 98
[6] MEMS Stage Integrated with Microlens Arrays for High-Resolution Beam Steering
Gokce, Sertan Kutal
Holmstrom, Sven
Hibert, Cyrille
Ataman, Caglar
Arslan, Aslihan
Seren, Huseyin R.
Urey, Hakan
[J]. PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, 2009, 1 (01): : 1319 - +
[7] Optical Beam Steering Using Vertically Actuated MEMS Grating Coupler
K. N., Jishnu
Sadasivan, Viswas
[J]. JOURNAL OF LIGHTWAVE TECHNOLOGY, 2023, 41 (23) : 7309 - 7315
[8] Optical beam steering using a 2D MEMS scanner
Petremand, Yves
Clerc, Pierre-Andre
Epitaux, Marc
Hauffe, Ralf
Noell, Wilfried
de Rooij, N. F.
[J]. OPTOMECHATRONIC ACTUATORS AND MANIPULATION III, 2007, 6715
[9] A NOVEL RECONFIGURABLE ANTENNA ARRAY WITH CONTROLLABLE TUNING AND BEAM STEERING
Katsouris, Adrianos G.
Nikolopoulos, Christos D.
Baklezos, Anargyros T.
Capsalis, Christos N.
[J]. MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, 2016, 58 (08) : 1782 - 1786
[10] Two-Dimensional MEMS Stage Integrated With Microlens Arrays for Laser Beam Steering
Gokce, Sertan Kutal
Holmstrom, Sven
Hibert, Cyrille
Olcer, Selim
Bowman, David
Urey, Hakan
[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2011, 20 (01) : 15 - 17

← 1 2 3 4 5 →